Handbook of silicon based MEMS materials and technologies [electronic resource]

• 其他作者：
  • Tilli, Markku.
• 其他題名：
  • Micro & nano technologies.
• 出版： London, UK : William Andrew
• 版本：2nd ed.
• 叢書名： Micro & nano technologies
• 主題： Microelectromechanical systems. , Microelectromechanical systems--Materials. , Silicon--Electric properties. , Electronic books.
• ISBN： 9780323312233 (electronic bk.) 、 0323312233 (electronic bk.) 、 9780323299657 (electronic bk.)
• FIND@SFXID: CGU
• 資料類型: 電子書
• 內容註: Includes bibliographical references and index.
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• 摘要註: The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs.
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