Nanofabrication : principles and applications

• 作者： Papadopoulos, Christo, author.
• 其他作者：
  • SpringerLink (Online service)
• 其他題名：
  • SpringerBriefs in materials.
• 出版： Cham : Springer International Publishing :Imprint: Springer
• 叢書名： SpringerBriefs in materials,
• 主題： Nanolithography. , Materials Science. , Nanotechnology. , Electronics and Microelectronics, Instrumentation. , Semiconductors. , Nanoscale Science and Technology.
• ISBN： 9783319317427 (electronic bk.) 、 9783319317403 (paper)
• FIND@SFXID: CGU
• 資料類型: 電子書
• 內容註: Introduction -- Silicon Planar Processing and Photolithography -- Direct-write Lithography Approaches -- Stamping Methods -- Scanning-probe Methods -- Natural Lithography -- Direct-Growth and Self-assembly -- Practical Examples and Case Studies of Nanofabrication.
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• 摘要註: This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated circuits, semiconductor quantum dots, metallic nanoparticles, carbon nanotubes, molecular structures, nanocomposites, arrays and superstructures. Nanofabrication applications in nanoelectronics, biotechnology, nanomechanical devices and nanophotonics will be examined. This brief will present the core concepts of nanofabrication relevant to researchers and industry in this important and rapidly evolving area.
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