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Micro/nano integrated fabrication technology and its applications in microenergy harvesting
- 作者： Zhang, Xiao-Sheng, author.
- 其他作者：
- 其他題名：
- Springer theses.
- 出版： Berlin, Heidelberg : Springer Berlin Heidelberg :Imprint: Springer
- 叢書名： Springer theses,
- 主題： Nanotechnology. , Nanostructures. , Biomimetic materials. , Engineering. , Nanotechnology and Microengineering. , Microengineering. , Energy Harvesting. , Electronics and Microelectronics, Instrumentation. , Nanotechnology.
- ISBN： 9783662488164 (electronic bk.) 、 9783662488140 (paper)
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FIND@SFXID:
CGU
- 資料類型: 電子書
- 摘要註: This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
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讀者標籤：
- 系統號： 005358629 | 機讀編目格式
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