New approaches to image processing based failure analysis of nano-scale ULSI devices [electronic resource]

• 作者： Zalevsky, Zeev.
• 其他作者：
  • Livshits, Pavel.
  • Gur, Eran.
• 其他題名：
  • Micro & nano technologies
• 出版： Amsterdam : Elsevier/William Andrew
• 叢書名： Micro & nano technologies series
• 主題： Integrated circuits--Ultra large scale integration--Testing. , Nanoelectronics. , Microelectronics
• ISBN： 9780323241434 (electronic bk.) 、 9780323241434
• FIND@SFXID: CGU
• 資料類型: 電子書
• 內容註: Includes bibliographical references.
• More
• 摘要註: New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise.
• 讀者標籤：

  需登入
• 引用連結：

  Copy Link
• 目前引用數
• Share: