Introduction to microsystem design [electronic resource]

• 作者： Schomburg, Werner Karl.
• 其他作者：
  • SpringerLink (Online service)
• 其他題名：
  • RWTHedition,
• 出版： Berlin, Heidelberg : Springer Berlin Heidelberg :Imprint: Springer
• 版本：2nd ed.
• 叢書名： RWTHedition,
• 主題： Microelectromechanical systems--Design and construction , Engineering , Electronics and Microelectronics, Instrumentation. , Circuits and Systems. , Nanotechnology and Microengineering.
• ISBN： 9783662470237 (electronic bk.) 、 9783662470220 (paper)
• FIND@SFXID: CGU
• 資料類型: 電子書
• 內容註: Scaling Laws -- Elastic deformations -- Thin Films -- Conductor Paths -- Electrical Measurements -- Membranes -- Strain gauges on membranes -- Beams -- Vibrations -- Capillaries -- Capacitive forces -- Piezoelectric effect -- Thermal actuators -- Micro optics -- Diffusion -- Micro valves -- Micro pumps -- Micro dosing -- Analogies of physical domains -- Mechanical devices for electronics.
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• 摘要註: This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.
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