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Introduction to microsystem design [electronic resource]
- 作者: Schomburg, Werner Karl.
- 其他作者:
- 出版: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg
- 叢書名: RWTHedition,
- 主題: Microelectromechanical systems--Design and construction , Engineering , Nanotechnology and Microengineering. , Optical and Electronic Materials. , Applied and Technical Physics. , Circuits and Systems.
- ISBN: 9783642194894 (electronic bk.) 、 9783642194887 (paper)
- FIND@SFXID: CGU
- 資料類型: 電子書
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讀者標籤:
- 系統號: 005070177 | 機讀編目格式