11
0
0
0
0
Micromachined devices and components [computer file]
- 出版： Bellingham, Wash., USA : SPIE
- 叢書名： SPIE proceedings series
- 主題： Microelectromechanical systems--Congresses. , Micromachining--Congresses
- 資料類型: 視聽(影像)
- 內容註: Selected spie papers on CD-ROM Sponsored by: SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, and: SPIE--The International Society for Optical Engineering
-
讀者標籤：
- 系統號： 005246511 | 機讀編目格式
館藏資訊
