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Micromachined devices and components [computer file]
- 出版： Bellingham, Wash., USA : SPIE
- 叢書名： SPIE proceedings series
- 主題： Microelectromechanical systems--Congresses. , Micromachining--Congresses
- 資料類型: 視聽(影像)
- 內容註: Selected spie papers on CD-ROM Sponsored by: SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, and: SPIE--The International Society for Optical Engineering
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讀者標籤：
- 系統號： 005246511 | 機讀編目格式
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