Introduction to micromechanisms and microactuators [electronic resource]

• 作者： Ghosh, Amitabha.
• 其他作者：
  • Corves, Burkhard.
  • SpringerLink (Online service)
• 其他題名：
  • Mechanisms and machine science ;
• 出版： New Delhi : Springer India :Imprint: Springer
• 叢書名： Mechanisms and machine science ;v.28
• 主題： Microelectromechanical systems , Engineering , Machinery and Machine Elements. , Mechatronics , Nanotechnology and Microengineering. , Vibration, Dynamical Systems, Control.
• ISBN： 9788132221449 (electronic bk.) 、 9788132221432 (paper)
• FIND@SFXID: CGU
• 資料類型: 電子書
• 內容註: Introduction -- Miniaturization and Microsystems -- Scaling Laws: Science of Miniaturization -- Micromechanisms -- Design of Micromechanisms -- Dynamics of Micromechanisms -- Microactuators -- Microfabrication and Futuristic Issues.
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• 摘要註: This book presents a basic introduction to micromechanisms and microactuators, particularly to their basic configurations and design. This book fills the persisting gap in the published literature on the mechanical manipulative aspects of micromechanisms. It also helps in offering specialized introductory courses on micromechanisms and microactuators not as part of MEMS sensing devices, but as mechanical manipulative systems. The level of the book is suitable for use in both undergraduate and introductory graduate programmes. The book presents an overview of miniaturization and scaling laws, basic design principles of micro-sized mechanisms and actuators, micro-fabrication processes, and some futuristic issues. The volume contains a large number of figures and illustrations for easy understanding by the readers. It will also be useful to researchers and professionals looking for an introduction to the topic.
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