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The MEMS handbook [electronic resource]
- 其他作者：
- 其他題名：
- MEMS, introduction and fundamentals
- MEMS, design and fabrication
- MEMS, applications
- 出版： Boca Raton, Fla. ;London : CRC
- 版本：2nd ed.
- 叢書名： Mechanical engineering series
- 主題： Microelectromechanical systems , Microelectronics , Nanotechnology , Electronic books.
- ISBN： 9786610643271 、 0849391385 (Cloth) 、 1420036564 (electronic bk.)
-
FIND@SFXID:
CGU
- 資料類型: 電子書
- 內容註: Includes bibliographical references and index. Title from e-book title screen (viewed October 15, 2007).
- 摘要註: The 'MEMS Handbook' offers state-of-the-art coverage of microelectromechanical systems, including their design, fabrication & applications, as well as physical modeling.
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讀者標籤：
- 系統號： 005026595 | 機讀編目格式
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